UHV systems
- Thin films deposition systems : MBE, sputtering, Laser ablation, CVD
- Analysis systems : XPS, ...
- UHV transfer substrate
Multi-axis substrates holders manipulators
Ion pumps
Components for the vacuum technologies
- KF, K, F, and CF flanges, gaskets, viewports...
- Manipulation under vacuum conditions (transfer rods, rotation and translation...)
- Effusion cells
Vacuum engineering
- Design with customer's specifications
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